August 2004 Archives by subject

• Messages sorted by: [ thread ] [ author ] [ date ]
• More info on this list...

Starting: Mon Aug 16 16:05:08 PDT 2004
Ending: Tue Aug 31 12:00:40 PDT 2004
Messages: 16

• Problem lampoly SNF 2004-08-25 07:01:20: Chlorine and BCl3 bottle change   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2004-08-25 07:01:20: Chlorine and BCl3 bottle change   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2004-08-26 13:00:49: Cl2 flow dropping to <25sccm during   gyama at snf.stanford.edu
• Problem lampoly SNF 2004-08-26 13:00:49: Cl2 flow dropping to <25sccm during   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2004-08-27 10:52:24: w/ both p5000 & pquest off   gyama at snf.stanford.edu
• Problem lampoly SNF 2004-08-27 10:52:24: w/ both p5000 & pquest off   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2004-08-31 10:33:53: recipe1 calls for 15 pressure, geting 3.5 step5   gyama at snf.stanford.edu
• Problem lampoly SNF 2004-08-31 10:33:53: recipe1 calls for 15 pressure, geting 3.5 step5   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-16 16:05:07: 1 wafers stuck in LL before etch chamber   gyama at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-16 16:05:07: 1 wafers stuck in LL before etch chamber   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-19 14:07:18: 1 wafer in chamber for unload, stuck there   gyama at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-19 14:07:18: 1 wafer in chamber for unload, stuck there   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-26 10:20:08: No chlorine flow   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-26 10:20:08: No chlorine flow   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-30 11:42:12: low pressure on clean2   ginel at snf.stanford.edu
• Shutdown lampoly SNF 2004-08-30 11:42:12: low pressure on clean2   eenriquez at snf.stanford.edu

Last message date: Tue Aug 31 12:00:40 PDT 2004
Archived on: Sun Dec 23 09:06:03 PST 2012

• Messages sorted by: [ thread ] [ author ] [ date ]
• More info on this list...