From gyama at snf.stanford.edu  Fri Jul  9 10:18:14 2004
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Fri, 9 Jul 2004 10:18:14 -0700
Subject: Problem lampoly SNF 2004-07-09 10:18:13: 172 gap motion stopped by emergency stop line
Message-ID: <mailman.341.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From gyama at snf.stanford.edu  Fri Jul 16 14:28:39 2004
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Fri, 16 Jul 2004 14:28:39 -0700
Subject: Shutdown lampoly SNF 2004-07-16 14:28:38: waiting for board diagram?
Message-ID: <mailman.342.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Sat Jul 24 17:13:40 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 24 Jul 2004 17:13:40 -0700
Subject: Shutdown lampoly SNF 2004-07-16 14:28:38: waiting for board diagram?
Message-ID: <mailman.343.1356282341.4111.lampoly-pcs@snf.stanford.edu>

changed bad amp interlock pcb and wet cleaned chamber



From cbaxter at snf.stanford.edu  Sat Jul 24 17:13:57 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 24 Jul 2004 17:13:57 -0700
Subject: Problem lampoly SNF 2004-07-09 10:18:13: 172 gap motion stopped by emergency stop line
Message-ID: <mailman.344.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From gyama at snf.stanford.edu  Mon Jul 26 13:02:45 2004
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Mon, 26 Jul 2004 13:02:45 -0700
Subject: Shutdown lampoly SNF 2004-07-26 13:02:40: gap error again, 3 wafers in system
Message-ID: <mailman.345.1356282341.4111.lampoly-pcs@snf.stanford.edu>

1 at load cassette, 1 at flat finder, 1 in load lock just before chamber



From cbaxter at snf.stanford.edu  Thu Jul 29 01:45:03 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 29 Jul 2004 01:45:03 -0700
Subject: Shutdown lampoly SNF 2004-07-26 13:02:40: gap error again, 3 wafers in system
Message-ID: <mailman.346.1356282341.4111.lampoly-pcs@snf.stanford.edu>

system ready for use. 



From mtang at snf.stanford.edu  Thu Jul 29 12:44:47 2004
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Thu, 29 Jul 2004 12:44:47 -0700
Subject: Shutdown lampoly SNF 2004-07-29 12:44:46: Wafer transfer error
Message-ID: <mailman.347.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Tried to run test wafers, but get a exit loadlock arm failure of some sort.  Also, recipe #2 seems to have disappeared.



From eenriquez at snf.stanford.edu  Thu Jul 29 14:39:46 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 29 Jul 2004 14:39:46 -0700
Subject: Shutdown lampoly SNF 2004-07-29 12:44:46: Wafer transfer error
Message-ID: <mailman.348.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Re-initialized wafer transfer robots.  Cycled about 8 wafers through the system with no problems.