Shutdown lampoly SNF 2004-07-26 13:02:40: gap error again, 3 wafers in system
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Jul 29 01:45:03 PDT 2004
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Shutdown lampoly SNF 2004-07-26 13:02:40: gap error again, 3 wafers in system
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Shutdown lampoly SNF 2004-07-29 12:44:46: Wafer transfer error
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system ready for use.
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Shutdown lampoly SNF 2004-07-26 13:02:40: gap error again, 3 wafers in system
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Shutdown lampoly SNF 2004-07-29 12:44:46: Wafer transfer error
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