From eenriquez at snf.stanford.edu  Tue Mar  9 09:59:05 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 9 Mar 2004 09:59:05 -0800
Subject: Shutdown lampoly 2004-03-09 09:59:05: test
Message-ID: <mailman.329.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Tue Mar  9 09:59:32 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 9 Mar 2004 09:59:32 -0800
Subject: Shutdown lampoly 2004-03-09 09:59:05: test
Message-ID: <mailman.330.1356282341.4111.lampoly-pcs@snf.stanford.edu>

testing completed



From cmfaulkn at snf.stanford.edu  Tue Mar 23 23:19:32 2004
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Tue, 23 Mar 2004 23:19:32 -0800
Subject: Shutdown lampoly 2004-03-23 23:19:22: sample lost in etch chamber
Message-ID: <mailman.331.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Please put sample in wafer holder.



From cbaxter at snf.stanford.edu  Wed Mar 24 17:32:25 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 24 Mar 2004 17:32:25 -0800
Subject: Shutdown lampoly 2004-03-23 23:19:22: sample lost in etch chamber
Message-ID: <mailman.332.1356282341.4111.lampoly-pcs@snf.stanford.edu>

vented chamber and removed wafer chip sample.
wet cleaned chamber with water and ipa.