From cmfaulkn at snf.stanford.edu  Mon May  3 23:21:01 2004
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Mon, 3 May 2004 23:21:01 -0700
Subject: Problem lampoly 2004-05-03 23:21:00: ALERT 340 is showing
Message-ID: <mailman.333.1356282341.4111.lampoly-pcs@snf.stanford.edu>

It claims that an internal timer will overflow in 18 hours, system must be reset.



From yue at snf.stanford.edu  Wed May  5 15:04:15 2004
From: yue at snf.stanford.edu (yue at snf.stanford.edu)
Date: Wed, 5 May 2004 15:04:15 -0700
Subject: Shutdown lampoly 2004-05-05 15:04:14: alarm 229 340 341
Message-ID: <mailman.334.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed May  5 16:10:38 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 5 May 2004 16:10:38 -0700
Subject: Shutdown lampoly 2004-05-05 15:04:14: alarm 229 340 341
Message-ID: <mailman.335.1356282341.4111.lampoly-pcs@snf.stanford.edu>

reboot system..



From cbaxter at snf.stanford.edu  Wed May  5 16:11:38 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 5 May 2004 16:11:38 -0700
Subject: Problem lampoly 2004-05-03 23:21:00: ALERT 340 is showing
Message-ID: <mailman.336.1356282341.4111.lampoly-pcs@snf.stanford.edu>

reboot system



From cmfaulkn at snf.stanford.edu  Fri May  7 17:43:27 2004
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Fri, 7 May 2004 17:43:27 -0700
Subject: Shutdown lampoly 2004-05-07 17:43:26: Bus Error
Message-ID: <mailman.337.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Found the etcher with a bus error on the main screen.  Buttons inoperative.



From eenriquez at snf.stanford.edu  Mon May 10 11:28:55 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 10 May 2004 11:28:55 -0700
Subject: Shutdown lampoly 2004-05-07 17:43:26: Bus Error
Message-ID: <mailman.338.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Reset the system



From ginel at snf.stanford.edu  Sat May 22 16:34:54 2004
From: ginel at snf.stanford.edu (ginel at snf.stanford.edu)
Date: Sat, 22 May 2004 16:34:54 -0700
Subject: Shutdown lampoly 2004-05-22 16:34:52: red alarm
Message-ID: <mailman.339.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Alarm 80: Pressure hard tolerance exceded on RF on step.
Left three wafers in process and shut down machine per instructions.



From cbaxter at snf.stanford.edu  Mon May 24 17:09:51 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 24 May 2004 17:09:51 -0700
Subject: Shutdown lampoly 2004-05-22 16:34:52: red alarm
Message-ID: <mailman.340.1356282341.4111.lampoly-pcs@snf.stanford.edu>

re-teach throttle valve and etched the last two remaining wafers