Problem lampoly SNF 2004-11-04 14:26:54: exit arm fail
yuanjun at snf.stanford.edu
yuanjun at snf.stanford.edu
Thu Nov 4 14:26:55 PST 2004
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Shutdown lampoly SNF 2004-11-02 12:38:50: Gap drive & turbo error
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Problem lampoly SNF 2004-11-04 14:26:54: exit arm fail
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after running 4 wafers, the exit arm is failed !!
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Shutdown lampoly SNF 2004-11-02 12:38:50: Gap drive & turbo error
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Problem lampoly SNF 2004-11-04 14:26:54: exit arm fail
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