From bwacker at snf.stanford.edu Tue Oct 5 17:19:38 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Tue, 5 Oct 2004 17:19:38 -0700 Subject: Shutdown lampoly SNF 2004-10-05 17:19:37: Alarms - messages still left on the screen Message-ID: From cbaxter at snf.stanford.edu Tue Oct 5 21:30:34 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Oct 2004 21:30:34 -0700 Subject: Shutdown lampoly SNF 2004-10-05 17:19:37: Alarms - messages still left on the screen Message-ID: cleared alarm and initialize gap. From bwacker at snf.stanford.edu Thu Oct 7 18:09:52 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Thu, 7 Oct 2004 18:09:52 -0700 Subject: Shutdown lampoly SNF 2004-10-07 18:09:51: Wafer stuck inside the machine Message-ID: From ericp at snf.stanford.edu Thu Oct 7 21:36:25 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 7 Oct 2004 21:36:25 -0700 Subject: Comment lampoly SNF 2004-10-07 21:36:24: cleared wafers Message-ID: I cleared out the wafers, but had intermittent gap failures along the way. It seems to be ok at the moment. From cbaxter at snf.stanford.edu Thu Oct 7 21:57:06 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Oct 2004 21:57:06 -0700 Subject: Comment lampoly SNF 2004-10-07 21:36:24: cleared wafers Message-ID: From cbaxter at snf.stanford.edu Thu Oct 7 21:57:11 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Oct 2004 21:57:11 -0700 Subject: Shutdown lampoly SNF 2004-10-07 18:09:51: Wafer stuck inside the machine Message-ID: From yuanjun at snf.stanford.edu Sat Oct 9 13:38:04 2004 From: yuanjun at snf.stanford.edu (yuanjun at snf.stanford.edu) Date: Sat, 9 Oct 2004 13:38:04 -0700 Subject: Problem lampoly SNF 2004-10-09 13:38:03: Gap error again..... Message-ID: Process cannot be run due to the gap error again,.... again.. From chozone at snf.stanford.edu Mon Oct 11 00:30:48 2004 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Mon, 11 Oct 2004 00:30:48 -0700 Subject: Problem lampoly SNF 2004-10-11 00:30:46: The arm doesn't grib wafer Message-ID: The arm doesn't grib wafer from the input cassette From hopcroft at snf.stanford.edu Mon Oct 11 15:18:37 2004 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Mon, 11 Oct 2004 15:18:37 -0700 Subject: Shutdown lampoly SNF 2004-10-11 15:18:36: lampoly shutdown - gap drive errors Message-ID: Repeated Gap drive (Galil) errors. Error # 69, 70 ,172. The errors reappear whenever you push Start. From cbaxter at snf.stanford.edu Wed Oct 13 23:01:15 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Oct 2004 23:01:15 -0700 Subject: Shutdown lampoly SNF 2004-10-11 15:18:36: lampoly shutdown - gap drive errors Message-ID: gap rebuild completed From cbaxter at snf.stanford.edu Wed Oct 13 23:01:23 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Oct 2004 23:01:23 -0700 Subject: Problem lampoly SNF 2004-10-11 00:30:46: The arm doesn't grib wafer Message-ID: From cbaxter at snf.stanford.edu Wed Oct 13 23:01:37 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Oct 2004 23:01:37 -0700 Subject: Problem lampoly SNF 2004-10-09 13:38:03: Gap error again..... Message-ID: From ynzhao at snf.stanford.edu Fri Oct 15 15:41:09 2004 From: ynzhao at snf.stanford.edu (ynzhao at snf.stanford.edu) Date: Fri, 15 Oct 2004 15:41:09 -0700 Subject: Problem lampoly SNF 2004-10-15 15:41:08: after enabled, cannot clear the alarm Message-ID: From cbaxter at snf.stanford.edu Fri Oct 15 16:57:32 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Oct 2004 16:57:32 -0700 Subject: Problem lampoly SNF 2004-10-15 15:41:08: after enabled, cannot clear the alarm Message-ID: system pc locked up. reboot tool and was ablen to etched user 3 sample wafers without a problem. From yuanjun at snf.stanford.edu Fri Oct 15 18:14:57 2004 From: yuanjun at snf.stanford.edu (yuanjun at snf.stanford.edu) Date: Fri, 15 Oct 2004 18:14:57 -0700 Subject: Problem lampoly SNF 2004-10-15 18:14:52: tubo fail, wafer stuck inside. Message-ID: From cbaxter at snf.stanford.edu Fri Oct 15 20:10:20 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Oct 2004 20:10:20 -0700 Subject: Problem lampoly SNF 2004-10-15 18:14:52: tubo fail, wafer stuck inside. Message-ID: pc locked up again. I adjusted the 5VDC supply from 4.93VDC to 5.01VDC and reset the tool. From yuanjun at snf.stanford.edu Fri Oct 15 21:50:15 2004 From: yuanjun at snf.stanford.edu (yuanjun at snf.stanford.edu) Date: Fri, 15 Oct 2004 21:50:15 -0700 Subject: Shutdown lampoly SNF 2004-10-15 21:50:14: Again, tubo error during process. Message-ID: wafer stack inside. From cbaxter at snf.stanford.edu Mon Oct 18 19:14:57 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 18 Oct 2004 19:14:57 -0700 Subject: Shutdown lampoly SNF 2004-10-18 19:14:56: Bad 24VDC power supply. Message-ID: From cbaxter at snf.stanford.edu Fri Oct 29 20:03:08 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 29 Oct 2004 20:03:08 -0700 Subject: Shutdown lampoly SNF 2004-10-18 19:14:56: Bad 24VDC power supply. Message-ID: installed rebuild 24VDC power supply and cycled system without a problem. From cbaxter at snf.stanford.edu Fri Oct 29 20:03:16 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 29 Oct 2004 20:03:16 -0700 Subject: Shutdown lampoly SNF 2004-10-15 21:50:14: Again, tubo error during process. Message-ID: