From ginel at snf.stanford.edu Thu Sep 2 17:13:31 2004 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Thu, 2 Sep 2004 17:13:31 -0700 Subject: Shutdown lampoly SNF 2004-09-02 17:13:30: exit arm stuck Message-ID: 2 dummy wafers in process From eenriquez at snf.stanford.edu Fri Sep 3 08:53:06 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Sep 2004 08:53:06 -0700 Subject: Shutdown lampoly SNF 2004-09-02 17:13:30: exit arm stuck Message-ID: Unloaded the wafer from the LL and chamber. Resumed process. From gyama at snf.stanford.edu Fri Sep 3 11:25:17 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 3 Sep 2004 11:25:17 -0700 Subject: Problem lampoly SNF 2004-09-03 11:25:16: 1/4 wafer piece still in chamber Message-ID: 3/4 of a wafer came out, do not see any of the 1/4 piece in the enter or exit LL. Must still be in chamber. From cbaxter at snf.stanford.edu Fri Sep 3 21:51:52 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 3 Sep 2004 21:51:52 -0700 Subject: Problem lampoly SNF 2004-09-03 11:25:16: 1/4 wafer piece still in chamber Message-ID: From yuanjun at snf.stanford.edu Fri Sep 10 14:24:50 2004 From: yuanjun at snf.stanford.edu (yuanjun at snf.stanford.edu) Date: Fri, 10 Sep 2004 14:24:50 -0700 Subject: Problem lampoly SNF 2004-09-10 14:24:49: lampoly problem Message-ID: It shows gap distance error, process cannot be done From eenriquez at snf.stanford.edu Fri Sep 10 15:14:15 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2004 15:14:15 -0700 Subject: Shutdown lampoly SNF 2004-09-10 15:14:15: Gap drive not moving Message-ID: From cbaxter at snf.stanford.edu Fri Sep 10 17:15:16 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 10 Sep 2004 17:15:16 -0700 Subject: Shutdown lampoly SNF 2004-09-10 15:14:15: Gap drive not moving Message-ID: manually turn on brake and moved gap chain by hand to clear limit safety microswitch. then intialize gap. From cbaxter at snf.stanford.edu Fri Sep 10 17:15:23 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 10 Sep 2004 17:15:23 -0700 Subject: Problem lampoly SNF 2004-09-10 14:24:49: lampoly problem Message-ID: From ginel at snf.stanford.edu Sat Sep 11 13:02:36 2004 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Sat, 11 Sep 2004 13:02:36 -0700 Subject: Shutdown lampoly SNF 2004-09-11 13:02:35: wafers lost in chamber; turbo pump error Message-ID: Three dummy wafers went into the chamber - none came out! Also there was a turbo pump error. From cbaxter at snf.stanford.edu Mon Sep 13 22:23:34 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Sep 2004 22:23:34 -0700 Subject: Shutdown lampoly SNF 2004-09-11 13:02:35: wafers lost in chamber; turbo pump error Message-ID: vented chamber and removed broken wafer chips. From ginel at snf.stanford.edu Tue Sep 14 12:41:59 2004 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Tue, 14 Sep 2004 12:41:59 -0700 Subject: Problem lampoly SNF 2004-09-14 12:41:59: gap drive errors cause aborts during process Message-ID: repeated gap drive errors during processing caused several etchs to abort; also gap drive overtemp errors From cbaxter at snf.stanford.edu Tue Sep 14 21:24:24 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Sep 2004 21:24:24 -0700 Subject: Problem lampoly SNF 2004-09-14 12:41:59: gap drive errors cause aborts during process Message-ID: From yuanjun at snf.stanford.edu Fri Sep 24 01:13:24 2004 From: yuanjun at snf.stanford.edu (yuanjun at snf.stanford.edu) Date: Fri, 24 Sep 2004 01:13:24 -0700 Subject: Problem lampoly SNF 2004-09-24 01:13:24: wafer stops in the transfer chamber. Message-ID: Wafer stops before it goes into the process chamber. From cbaxter at snf.stanford.edu Sat Sep 25 20:15:51 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 25 Sep 2004 20:15:51 -0700 Subject: Shutdown lampoly SNF 2004-09-25 20:15:50: bad galil controller pcb Message-ID: From cbaxter at snf.stanford.edu Tue Sep 28 22:26:15 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Sep 2004 22:26:15 -0700 Subject: Shutdown lampoly SNF 2004-09-25 20:15:50: bad galil controller pcb Message-ID: gap communicating now. cycled wafer without a problem. From cbaxter at snf.stanford.edu Tue Sep 28 22:26:27 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Sep 2004 22:26:27 -0700 Subject: Problem lampoly SNF 2004-09-24 01:13:24: wafer stops in the transfer chamber. Message-ID: