Problem lampoly SNF 2005-04-01 16:49:32: repeated lockups

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 4 12:19:48 PDT 2005


Adjusted the I/O 5 volt power supply from 4.95 V to 5.10 V.  Cycled 6 wafers using recipe 1 with no problems. 




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