From tura at snf.stanford.edu Tue Aug 9 14:51:40 2005 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 9 Aug 2005 14:51:40 -0700 Subject: Shutdown lampoly SNF 2005-08-09 14:51:37: wafers stuck Message-ID: i get an error "wafers not sensed at exit cassette" and my wafers are stuck. i dont want to clear it myself. please take a look. From cbaxter at snf.stanford.edu Tue Aug 9 17:14:07 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 9 Aug 2005 17:14:07 -0700 Subject: Shutdown lampoly SNF 2005-08-09 14:51:37: wafers stuck Message-ID: completed etching the rest of the wafer, had to unload each wafer after etched. receiver elevator wafer sense is unable to detect the wafer due ot oxide film on back of he sample wafer. From riteshj at snf.stanford.edu Tue Aug 16 16:38:17 2005 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 16 Aug 2005 16:38:17 -0700 Subject: Shutdown lampoly SNF 2005-08-16 16:38:16: wafer stuck in chamber Message-ID: dummy wafer stuck in chamber and my wafer is in the load lock chamber From cbaxter at snf.stanford.edu Tue Aug 16 16:58:58 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 Aug 2005 16:58:58 -0700 Subject: Shutdown lampoly SNF 2005-08-16 16:38:16: wafer stuck in chamber Message-ID: exit robot arm failed to see home position. arm was jammed had to turn off 24v and manually moved arm to free itself and initialize after. recovered stuck wafer inside chamber without venting chamber.