Shutdown lampoly SNF 2005-08-09 14:51:37: wafers stuck

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Aug 9 17:14:07 PDT 2005


completed etching the rest of the wafer, had to unload each
wafer after etched. receiver elevator wafer sense is unable
to detect  the wafer due ot oxide film on back of he sample
wafer.




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