Shutdown lampoly SNF 2005-08-16 16:38:16: wafer stuck in chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Aug 16 16:58:58 PDT 2005


exit robot arm failed to see home position. arm was jammed
had to turn off 24v and manually moved arm to free itself and
initialize after. recovered stuck wafer inside chamber without
venting chamber.




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