From ericp at snf.stanford.edu Wed Feb 2 19:08:24 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 2 Feb 2005 19:08:24 -0800 Subject: Problem lampoly SNF 2005-02-02 19:08:23: XLL inner door failure on unload from chamber Message-ID: Dummy wafer -> no problems. Real wafer -> failure! (Of course :^) From cbaxter at snf.stanford.edu Wed Feb 2 19:32:41 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 2 Feb 2005 19:32:41 -0800 Subject: Problem lampoly SNF 2005-02-02 19:08:23: XLL inner door failure on unload from chamber Message-ID: manually close and repaired air leak on solenoid manifold block. From ericp at snf.stanford.edu Thu Feb 10 18:44:29 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 10 Feb 2005 18:44:29 -0800 Subject: Problem lampoly SNF 2005-02-10 18:44:29: Galil gap drive errors. Message-ID: Upon starting (just loading, nothing in chamber), several Galil gap drive errors appear. Clear them but they come right back. From cbaxter at snf.stanford.edu Thu Feb 10 19:31:28 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Feb 2005 19:31:28 -0800 Subject: Problem lampoly SNF 2005-02-10 18:44:29: Galil gap drive errors. Message-ID: repaired bad connection on gap at position. From yue at snf.stanford.edu Sun Feb 13 22:25:47 2005 From: yue at snf.stanford.edu (yue at snf.stanford.edu) Date: Sun, 13 Feb 2005 22:25:47 -0800 Subject: Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber Message-ID: From eenriquez at snf.stanford.edu Mon Feb 14 09:02:58 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Feb 2005 09:02:58 -0800 Subject: Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber Message-ID: Re-initialized the unload arm. Second wafer completed processing. Both wafers are in the unload cassette.. From rcrane at snf.stanford.edu Fri Feb 18 16:25:15 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 18 Feb 2005 16:25:15 -0800 Subject: Problem lampoly SNF 2005-02-18 16:25:09: HBr not available Message-ID: HBr is not available for this tool. The gas purge panel has developed a gas leak and will need to be rebuilt. Earliest uptime may be 2/23/05 afternoon. Sorry for the unscheduled down time, Dick From eenriquez at snf.stanford.edu Thu Feb 24 12:46:17 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Feb 2005 12:46:17 -0800 Subject: Problem lampoly SNF 2005-02-18 16:25:09: HBr not available Message-ID: HBr now available.