Problem lampoly SNF 2005-02-10 18:44:29: Galil gap drive errors.
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Feb 10 19:31:28 PST 2005
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Problem lampoly SNF 2005-02-10 18:44:29: Galil gap drive errors.
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Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber
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repaired bad connection on gap at position.
Previous message:
Problem lampoly SNF 2005-02-10 18:44:29: Galil gap drive errors.
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Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber
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