Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber
yue at snf.stanford.edu
yue at snf.stanford.edu
Sun Feb 13 22:25:47 PST 2005
Previous message:
Problem lampoly SNF 2005-02-10 18:44:29: Galil gap drive errors.
Next message:
Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Problem lampoly SNF 2005-02-10 18:44:29: Galil gap drive errors.
Next message:
Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the lampoly-pcs mailing list