Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Feb 14 09:02:58 PST 2005


Re-initialized the unload arm.  Second wafer completed processing.  Both wafers are in the unload cassette..




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