Problem lampoly SNF 2005-02-18 16:25:09: HBr not available

rcrane at snf.stanford.edu rcrane at snf.stanford.edu
Fri Feb 18 16:25:15 PST 2005

Previous message: Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber
Next message: Problem lampoly SNF 2005-02-18 16:25:09: HBr not available
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

HBr is not available for this tool. The gas purge panel has developed a gas leak and will need to be rebuilt. Earliest uptime may be 2/23/05 afternoon.
Sorry for the unscheduled down time,
Dick

Previous message: Shutdown lampoly SNF 2005-02-13 22:25:46: alarm 21, 46, 80 and 2 wafers stuck in the chamber
Next message: Problem lampoly SNF 2005-02-18 16:25:09: HBr not available
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list