From eenriquez at snf.stanford.edu  Mon Jan  3 15:58:53 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 3 Jan 2005 15:58:53 -0800
Subject: Comment lampoly SNF 2005-01-03 15:58:52: Work done during shutdown
Message-ID: <mailman.413.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Ceasar wet cleaned the chamber.



From mislam at snf.stanford.edu  Tue Jan  4 13:40:35 2005
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Tue, 4 Jan 2005 13:40:35 -0800
Subject: Shutdown lampoly SNF 2005-01-04 13:40:34: Wafer stuck
Message-ID: <mailman.414.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Exit load-lock inner door won't close. 1 wafer in chamber,
1 at exit load-lock and 1 at entry flat locator position.
Machine also had a RF tolerance error.



From cbaxter at snf.stanford.edu  Tue Jan  4 16:57:09 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 4 Jan 2005 16:57:09 -0800
Subject: Shutdown lampoly SNF 2005-01-04 13:40:34: Wafer stuck
Message-ID: <mailman.415.1356282341.4111.lampoly-pcs@snf.stanford.edu>

manually home entrance load arm and unload stuck wafer.
also, zeroed vat controller and re-teach.



From cbaxter at snf.stanford.edu  Tue Jan  4 16:57:20 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 4 Jan 2005 16:57:20 -0800
Subject: Comment lampoly SNF 2005-01-03 15:58:52: Work done during shutdown
Message-ID: <mailman.416.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Jan  5 09:48:55 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 5 Jan 2005 09:48:55 -0800
Subject: Shutdown lampoly SNF 2005-01-05 09:48:54: wafers not going into entrance loadlock
Message-ID: <mailman.417.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Jan  5 18:32:37 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 5 Jan 2005 18:32:37 -0800
Subject: Shutdown lampoly SNF 2005-01-05 09:48:54: wafers not going into entrance loadlock
Message-ID: <mailman.418.1356282341.4111.lampoly-pcs@snf.stanford.edu>

recovered wafer on exit load lock and adjusted wafer handoff
from chamber to exit load lock arm.



From yuanjun at snf.stanford.edu  Thu Jan 27 22:40:45 2005
From: yuanjun at snf.stanford.edu (yuanjun at snf.stanford.edu)
Date: Thu, 27 Jan 2005 22:40:45 -0800
Subject: Problem lampoly SNF 2005-01-27 22:40:44: chilly water fail, tubo not ready.
Message-ID: <mailman.419.1356282341.4111.lampoly-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jan 28 16:20:47 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 28 Jan 2005 16:20:47 -0800
Subject: Problem lampoly SNF 2005-01-27 22:40:44: chilly water fail, tubo not ready.
Message-ID: <mailman.420.1356282341.4111.lampoly-pcs@snf.stanford.edu>

Reset the chiller and both mechanical pumps.