Shutdown lampoly SNF 2005-01-04 13:40:34: Wafer stuck

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Jan 4 13:40:35 PST 2005


Exit load-lock inner door won't close. 1 wafer in chamber,
1 at exit load-lock and 1 at entry flat locator position.
Machine also had a RF tolerance error.




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