From tberg at snf.stanford.edu  Mon Jul 11 16:34:10 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 11 Jul 2005 16:34:10 -0700
Subject: Problem lampoly SNF 2005-07-11 16:34:07: HBR Cylinder Down Leak
Message-ID: <mailman.455.1356282342.4111.lampoly-pcs@snf.stanford.edu>




From king at snf.stanford.edu  Wed Jul 13 15:53:57 2005
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Wed, 13 Jul 2005 15:53:57 -0700
Subject: Problem lampoly SNF 2005-07-13 15:53:56: Lam poly etcher error 58
Message-ID: <mailman.456.1356282342.4111.lampoly-pcs@snf.stanford.edu>

Entrance load lock arm failed initiation.  Tried restarting, re-enabling etc.  



From cbaxter at snf.stanford.edu  Wed Jul 13 16:46:36 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 13 Jul 2005 16:46:36 -0700
Subject: Problem lampoly SNF 2005-07-13 15:53:56: Lam poly etcher error 58
Message-ID: <mailman.457.1356282342.4111.lampoly-pcs@snf.stanford.edu>

initialize load and entrance arm.



From cbaxter at snf.stanford.edu  Wed Jul 13 16:47:26 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 13 Jul 2005 16:47:26 -0700
Subject: Problem lampoly SNF 2005-07-11 16:34:07: HBR Cylinder Down Leak
Message-ID: <mailman.458.1356282342.4111.lampoly-pcs@snf.stanford.edu>

hbr is back online. flow for 15mins at 100%