From eenriquez at snf.stanford.edu  Fri Jun 17 09:42:00 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 17 Jun 2005 09:42:00 -0700
Subject: Shutdown lampoly SNF 2005-06-17 09:41:54: Starting up from power outage
Message-ID: <mailman.451.1356282342.4111.lampoly-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jun 17 11:51:05 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 17 Jun 2005 11:51:05 -0700
Subject: Shutdown lampoly SNF 2005-06-17 09:41:54: Starting up from power outage
Message-ID: <mailman.452.1356282342.4111.lampoly-pcs@snf.stanford.edu>

Completed powering up system



From ginel at snf.stanford.edu  Mon Jun 20 15:41:32 2005
From: ginel at snf.stanford.edu (ginel at snf.stanford.edu)
Date: Mon, 20 Jun 2005 15:41:32 -0700
Subject: Problem lampoly SNF 2005-06-20 15:41:31: pressure, dc bias too low during etch
Message-ID: <mailman.453.1356282342.4111.lampoly-pcs@snf.stanford.edu>

The pressure is at 7 mT during etch steps, with the valve at 100%, despite a high set point.  The DC bias in then too low, at -31 V.



From cbaxter at snf.stanford.edu  Mon Jun 20 18:36:36 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 20 Jun 2005 18:36:36 -0700
Subject: Problem lampoly SNF 2005-06-20 15:41:31: pressure, dc bias too low during etch
Message-ID: <mailman.454.1356282342.4111.lampoly-pcs@snf.stanford.edu>

calibrated valve controller @ 10,13,and 15mt.