Problem lampoly SNF 2005-06-20 15:41:31: pressure, dc bias too low during etch

ginel at snf.stanford.edu ginel at snf.stanford.edu
Mon Jun 20 15:41:32 PDT 2005


The pressure is at 7 mT during etch steps, with the valve at 100%, despite a high set point.  The DC bias in then too low, at -31 V.




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