From ericp at snf.stanford.edu Sat Mar 19 16:36:13 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 19 Mar 2005 16:36:13 -0800 Subject: Shutdown lampoly SNF 2005-03-19 16:36:12: Gap drive problem Message-ID: The gap drive seems to stick when it drives to 8.3" for loading. Gives error #378. It keeps trying so I manually set the gap to 8" and it is happy (that is, it's no longer driving, and indicates that it is at setpoint). The gap drives fine everywhere else, but sticks at 8.3, which is unfortunately the position needed for loading and unloading. There's one wafer in the system, presently in the ELL. Wafer is a machine dummy. From eenriquez at snf.stanford.edu Mon Mar 21 15:30:53 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Mar 2005 15:30:53 -0800 Subject: Shutdown lampoly SNF 2005-03-19 16:36:12: Gap drive problem Message-ID: Recalibrated the gap drive (added 16 steps). Calibrated throttle valve and zeroed. Cycled 12 wafers ( recipe 1) with no problems. From king at snf.stanford.edu Thu Mar 24 14:52:16 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 24 Mar 2005 14:52:16 -0800 Subject: Shutdown lampoly SNF 2005-03-24 14:52:16: Wafer stuck in etch chamber and Message-ID: load locks won't pump again. From ericp at snf.stanford.edu Thu Mar 24 22:24:55 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 24 Mar 2005 22:24:55 -0800 Subject: Comment lampoly SNF 2005-03-24 22:24:55: Wafer cleared from chamber Message-ID: The broken wafer was cleaned up. Leak rate <1mT/min. It appears that there are two problems: First, the Entrance Load Lock door fails to close or takes too long, and then an alarm appears. Second, possibly related to the first as it seems to occur at the same time, the exit load lock arm goes in to get the wafer from the chamber, comes out empty, and then the wafer from the entrance load lock crashes into the wafer left in the chamber. As for the first problem, it looks like the pneumatic cylinder on the ELL outer door is leaking by. When the slow closing occurs, you can hear the hissing. -Eric From eenriquez at snf.stanford.edu Fri Mar 25 16:23:10 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Mar 2005 16:23:10 -0800 Subject: Shutdown lampoly SNF 2005-03-24 14:52:16: Wafer stuck in etch chamber and Message-ID: Still broken wafer in system. Clearing shutdown so tha Eric P can run it. From eenriquez at snf.stanford.edu Fri Mar 25 16:23:44 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Mar 2005 16:23:44 -0800 Subject: Problem lampoly SNF 2005-03-25 16:23:43: Broken wafer in the chamber Message-ID: From eenriquez at snf.stanford.edu Mon Mar 28 07:27:44 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Mar 2005 07:27:44 -0800 Subject: Comment lampoly SNF 2005-03-24 22:24:55: Wafer cleared from chamber Message-ID: Thanks From cbaxter at snf.stanford.edu Tue Mar 29 20:54:30 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Mar 2005 20:54:30 -0800 Subject: Problem lampoly SNF 2005-03-25 16:23:43: Broken wafer in the chamber Message-ID: broken wafer was cleaned by eric.