Shutdown lampoly SNF 2005-03-19 16:36:12: Gap drive problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 21 15:30:53 PST 2005


Recalibrated the gap drive (added 16 steps).  Calibrated throttle valve and zeroed.  Cycled 12 wafers ( recipe 1) with no problems.




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