Shutdown lampoly SNF 2005-03-24 14:52:16: Wafer stuck in etch chamber and
king at snf.stanford.edu
king at snf.stanford.edu
Thu Mar 24 14:52:16 PST 2005
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Shutdown lampoly SNF 2005-03-19 16:36:12: Gap drive problem
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Shutdown lampoly SNF 2005-03-24 14:52:16: Wafer stuck in etch chamber and
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load locks won't pump again.
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Shutdown lampoly SNF 2005-03-19 16:36:12: Gap drive problem
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Shutdown lampoly SNF 2005-03-24 14:52:16: Wafer stuck in etch chamber and
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