From eenriquez at snf.stanford.edu Mon May 9 09:18:57 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 May 2005 09:18:57 -0700 Subject: Problem lampoly SNF 2005-05-09 09:18:55: HBr is not availabe. Message-ID: The HBr cylinder has a leak and is currently under repair From latta at snf.stanford.edu Tue May 10 10:38:14 2005 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 10 May 2005 10:38:14 -0700 Subject: Shutdown lampoly SNF 2005-05-10 10:38:12: HBr reapair in progress.... Message-ID: From eenriquez at snf.stanford.edu Wed May 11 11:28:43 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 May 2005 11:28:43 -0700 Subject: Shutdown lampoly SNF 2005-05-10 10:38:12: HBr reapair in progress.... Message-ID: User wants to run a process that does not require HBr From latta at snf.stanford.edu Wed May 11 15:29:10 2005 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 May 2005 15:29:10 -0700 Subject: Shutdown lampoly SNF 2005-05-11 15:29:10: HBr not resolved Message-ID: From seymour at snf.stanford.edu Wed May 18 11:19:18 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 18 May 2005 11:19:18 -0700 Subject: Problem lampoly SNF 2005-05-09 09:18:55: HBr is not availabe. Message-ID: HBR system is leak tight and HBR is back on From seymour at snf.stanford.edu Wed May 18 11:19:49 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 18 May 2005 11:19:49 -0700 Subject: Shutdown lampoly SNF 2005-05-11 15:29:10: HBr not resolved Message-ID: The HBR is back on From bchui at snf.stanford.edu Sun May 22 15:35:56 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 22 May 2005 15:35:56 -0700 Subject: Shutdown lampoly SNF 2005-05-22 15:35:55: Error 22 Message-ID: Error 22: Exit arm failed requested extension action during seasoning. Only dummy wafers in machine; no device wafers. From emyers at snf.stanford.edu Mon May 23 17:15:31 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 May 2005 17:15:31 -0700 Subject: Comment lampoly SNF 2005-05-23 17:15:31: Pump-Purge Message-ID: I enabled system so an Auto Pump-Purge sequence could be started. From cbaxter at snf.stanford.edu Mon May 23 21:59:52 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 May 2005 21:59:52 -0700 Subject: Comment lampoly SNF 2005-05-23 17:15:31: Pump-Purge Message-ID: From cbaxter at snf.stanford.edu Mon May 23 22:01:16 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 May 2005 22:01:16 -0700 Subject: Shutdown lampoly SNF 2005-05-22 15:35:55: Error 22 Message-ID: vented chamber. eric and i wet cleaned chamber. also, wiped down down load lock. From ginel at snf.stanford.edu Fri May 27 16:56:28 2005 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Fri, 27 May 2005 16:56:28 -0700 Subject: Problem lampoly SNF 2005-05-27 16:56:22: Several aborts from RF hard tol. exceded Message-ID: Receipe 23 From cbaxter at snf.stanford.edu Fri May 27 18:59:48 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 27 May 2005 18:59:48 -0700 Subject: Problem lampoly SNF 2005-05-27 16:56:22: Several aborts from RF hard tol. exceded Message-ID: changed initial rf setpoint. ran recipe #23 without a problem.