From king at snf.stanford.edu Thu Sep 1 16:40:02 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 1 Sep 2005 16:40:02 -0700 Subject: Problem lampoly SNF 2005-09-01 16:40:01: Lam etch non-uniformity Message-ID: Poly isn't clearing off one side of the wafer even after a somewhat extended etch time. Gives a sloping, non-specific EP using pgm 25. One problem is that few people are recording anything in the logbook-- 83 wafers went unrecorded between my last two runs. Will try running more wafers to clean up the system. From king at snf.stanford.edu Thu Sep 1 17:30:32 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 1 Sep 2005 17:30:32 -0700 Subject: Problem lampoly SNF 2005-09-01 17:30:31: Lam error 80- run aborted Message-ID: "Pressure hard tolerance exceeded during an RF-on step." Two dummy wafers are in the machine, not important wafers. From king at snf.stanford.edu Thu Sep 1 18:08:51 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 1 Sep 2005 18:08:51 -0700 Subject: Shutdown lampoly SNF 2005-09-01 18:08:51: Shutdown Lam etcher Message-ID: Needs to be opened up. From cbaxter at snf.stanford.edu Thu Sep 1 22:09:14 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Sep 2005 22:09:14 -0700 Subject: Shutdown lampoly SNF 2005-09-01 18:08:51: Shutdown Lam etcher Message-ID: vented chamber and wet cleaned. also, found a small wafer chip on top of the electrode. From cbaxter at snf.stanford.edu Thu Sep 1 22:09:52 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Sep 2005 22:09:52 -0700 Subject: Problem lampoly SNF 2005-09-01 17:30:31: Lam error 80- run aborted Message-ID: calibrate throttle valve controller. From cbaxter at snf.stanford.edu Thu Sep 1 22:09:57 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Sep 2005 22:09:57 -0700 Subject: Problem lampoly SNF 2005-09-01 16:40:01: Lam etch non-uniformity Message-ID: