Problem lampoly SNF 2005-09-01 16:40:01: Lam etch non-uniformity

king at snf.stanford.edu king at snf.stanford.edu
Thu Sep 1 16:40:02 PDT 2005


Poly isn't clearing off one side of the wafer even after a somewhat extended etch time.  Gives a sloping, non-specific EP using pgm 25.  One problem is that few people are recording anything in the logbook-- 83 wafers went unrecorded between my last two runs.  Will try running more wafers to clean up the system. 




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