Shutdown lampoly SNF 2005-09-01 18:08:51: Shutdown Lam etcher

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Sep 1 22:09:14 PDT 2005


vented chamber and wet cleaned. also, found a small
wafer chip on top of the electrode.




More information about the lampoly-pcs mailing list