Shutdown lampoly SNF 2006-04-06 18:15:16: yeah, three wafers in the chamber...

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Apr 7 17:42:55 PDT 2006


Elmer. and I  repaired broken upper limit sensor and home
gap. Cycled 5 dummy wafers w/o problem.




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