Shutdown lampoly SNF 2006-08-02 14:05:39: Wafer stuck in process chamber

king at snf.stanford.edu king at snf.stanford.edu
Wed Aug 2 14:05:40 PDT 2006


due to "error #80: pressure out of tolerance during an RF On step."  This happened again during the overetch step #7, on Pgm 77.  I think it will need to be changed from 10% to 20% until the pump problems get straightened out.  
In the meantime we need a hand getting the wafer out.  All are dummies and this machine check was done on community service time.




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