Shutdown lampoly SNF 2006-08-02 14:05:39: Wafer stuck in process chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Aug 2 22:17:49 PDT 2006


rebuild throttle valve assembly and re-teach throttle valve
controller. also, repaired broken wire for bias and lower 
reflective feedback signal. run oxide wafer using recipe#77
w/out problem. pressure on 10,13 and 15 setpoint are 
stable.




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