Problem lampoly SNF 2006-08-04 10:57:37: Error 383 - temperature tolerance exceeded

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Fri Aug 4 10:57:40 PDT 2006


"lower chamber XLL (chan 3) temperature tolerance exceeded"
Aborted process so no wafers stuck in system.  In status page lower chamber temperature reads 43 with setpoint of 35.  Error might eventually clear itself as chamber cools.




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