Problem lampoly SNF 2006-08-07 13:31:15: Error 383 temperature tolerance exceeded

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Mon Aug 7 13:31:16 PDT 2006


Same error as before.  Lower chamber temp goes up to 50 deg before starting back down to setpoint of 35.  In both cases, error occured after 11 wafers (660s etch time) were run.  Users should be aware that it is probably a good idea to let the machine cool down in between every 10 wafers or so.
"lower chamber XLL (chan 3) temperature tolerance exceeded"




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