Shutdown lampoly SNF 2006-08-09 09:57:12: Chamber vacuum leak

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Aug 9 16:58:15 PDT 2006


right now the bypass pumping foreline is bypass and
disconnected. Jim and I temp put apizon paste that seem to
plug the leak on the kp40., we run auto l/c is @4 mt per min.
this is after 10mins on pump on the chamber w/turbo on.
Cycled 6 dummie  wafers and turbo stayed @597hz and 
seem to be holding fine and also recovered right no load.
Still need to address the leak on the kf40.




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