Shutdown lampoly SNF 2006-08-12 23:12:11: error 57 still showing

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 14 09:18:55 PDT 2006


The load arm vacuum line was jamming the arm during the homing sequence.  Rerouted the vacuum line.  Ran 4 wafers with no problem




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