Problem lampoly SNF 2006-08-11 16:32:26: error 57

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 14 09:19:17 PDT 2006


The load arm vacuum line was jamming the arm during the homing sequence.  Rerouted the vacuum line.  Ran 4 wafers with no problem




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