August 2006 Archives by subject

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Starting: Tue Aug 1 08:56:02 PDT 2006
Ending: Mon Aug 14 17:25:47 PDT 2006
Messages: 27

• Problem lampoly SNF 2006-07-24 18:23:38: Error #80, Pressure.   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-07-24 19:43:13: Main etch pressure has been unstable   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-07-24 22:52:28: one last one - error 383   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-07-25 17:43:59: RF stabilization problem recipe 2   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-08-04 10:57:37: Error 383 - temperature tolerance exceeded   rwoo at snf.stanford.edu
• Problem lampoly SNF 2006-08-04 10:57:37: Error 383 - temperature tolerance exceeded   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-08-04 11:05:57: chamber temperature still increasing   rwoo at snf.stanford.edu
• Problem lampoly SNF 2006-08-04 11:05:57: chamber temperature still increasing   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-08-07 13:31:15: Error 383 temperature tolerance exceeded   rwoo at snf.stanford.edu
• Problem lampoly SNF 2006-08-07 13:31:15: Error 383 temperature tolerance exceeded   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-08-07 13:57:18: Error 383 Temperatur etolerance exceeded   riteshj at snf.stanford.edu
• Problem lampoly SNF 2006-08-07 13:57:18: Error 383 Temperatur etolerance exceeded   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-08-08 13:31:34: turbo pump failure   riteshj at snf.stanford.edu
• Problem lampoly SNF 2006-08-08 13:31:34: turbo pump failure   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2006-08-11 16:32:26: error 57   bkyen at snf.stanford.edu
• Problem lampoly SNF 2006-08-11 16:32:26: error 57   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2006-07-31 14:33:32: Error 184- chiller   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-02 14:05:39: Wafer stuck in process chamber   king at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-02 14:05:39: Wafer stuck in process chamber   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-07 14:16:55: wafers stuck   riteshj at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-07 14:16:55: wafers stuck   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-09 09:57:12: Chamber vacuum leak   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-09 09:57:12: Chamber vacuum leak   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-12 23:12:11: error 57 still showing   rwoo at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-12 23:12:11: error 57 still showing   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-14 14:58:16: Chuck vacum sensor fail   chozone at snf.stanford.edu
• Shutdown lampoly SNF 2006-08-14 14:58:16: Chuck vacum sensor fail   cbaxter at snf.stanford.edu

Last message date: Mon Aug 14 17:25:47 PDT 2006
Archived on: Sun Dec 23 09:06:05 PST 2012

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