From bchui at snf.stanford.edu Mon Dec 11 23:28:17 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 11 Dec 2006 23:28:17 -0800 Subject: Problem lampoly SNF 2006-12-11 23:28:17: Wafer suspected to be stuck in etch chamber Message-ID: When the exit loader arm went in to unload the wafer from the etch chamber, it came out empty handed. But no alarm happened. Do not use machine until it's verified that etch chamber is OK. From cbaxter at snf.stanford.edu Tue Dec 12 14:22:32 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 12 Dec 2006 14:22:32 -0800 Subject: Problem lampoly SNF 2006-12-11 23:28:17: Wafer suspected to be stuck in etch chamber Message-ID: Recovered wafer from main chamber and wet cleaned chamber. From sdogbe at snf.stanford.edu Sat Dec 16 02:20:41 2006 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Sat, 16 Dec 2006 02:20:41 -0800 Subject: Problem lampoly SNF 2006-12-16 02:20:41: Wafer fell off robot arm during transfer Message-ID: Wafer fell off robot arm into loadlock chamber during wafer transfer From cbaxter at snf.stanford.edu Wed Dec 20 11:26:15 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 20 Dec 2006 11:26:15 -0800 Subject: Problem lampoly SNF 2006-12-16 02:20:41: Wafer fell off robot arm during transfer Message-ID: Cleaned up broken wafer on entrance l/l. Please DO NOT load double wafer it will not work on inside the chamber due to a mechanical clamping force.