From mtang at snf.stanford.edu Thu Feb 2 15:10:10 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 2 Feb 2006 15:10:10 -0800 Subject: Shutdown lampoly SNF 2006-02-02 15:10:10: RF Error Message-ID: While running dummy wafers, recipe #1, the RF power comes on. It reaches the set point of 250 W on the top electrode (248-252 W) in step 3 but the lower electrode only gets to 30 (setpoint 40W.) Then, the system alarms red. From cbaxter at snf.stanford.edu Thu Feb 2 16:45:38 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Feb 2006 16:45:38 -0800 Subject: Shutdown lampoly SNF 2006-02-02 15:10:10: RF Error Message-ID: lower power will not tuned to lower power less than 45 watts. checked the original generator that went bad, it was set for hi/lo frequency. i calibrated the generator to tuned at 40watts, the lowest reflective i can get is 5 watts. From bchui at snf.stanford.edu Sun Feb 12 20:16:59 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 12 Feb 2006 20:16:59 -0800 Subject: Problem lampoly SNF 2006-02-12 20:16:57: Gas 2 flow unstable Message-ID: machine aborted main etch (step 5) after a few seconds--HBr flow was unstable (I saw it fluctuating continuously between 85 and 115 sccm). retried with same result. From cbaxter at snf.stanford.edu Mon Feb 13 07:59:02 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Feb 2006 07:59:02 -0800 Subject: Problem lampoly SNF 2006-02-12 20:16:57: Gas 2 flow unstable Message-ID: flowed gas for 10min and recal. From riteshj at snf.stanford.edu Sat Feb 18 13:34:53 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Sat, 18 Feb 2006 13:34:53 -0800 Subject: Problem lampoly SNF 2006-02-18 13:34:53: Error message Message-ID: Says : HBR tolerance exceeded during RF. the HBr rate (100) keeps fluctuating between 85 and 115 and never stabilizes ... From king at snf.stanford.edu Sat Feb 18 14:58:44 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 18 Feb 2006 14:58:44 -0800 Subject: Problem lampoly SNF 2006-02-18 14:58:43: Lam etcher, same problem with HBr flow Message-ID: Wafers are in the machine. From king at snf.stanford.edu Sat Feb 18 16:05:18 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 18 Feb 2006 16:05:18 -0800 Subject: Comment lampoly SNF 2006-02-18 16:05:17: lam etcher-- stuck wafers are just dummies Message-ID: of no value. From cbaxter at snf.stanford.edu Mon Feb 20 23:09:59 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 23:09:59 -0800 Subject: Problem lampoly SNF 2006-02-18 14:58:43: Lam etcher, same problem with HBr flow Message-ID: close the manual valve on system gas box and pumped out hbr for 1hr. pump purge hbr mfc till become stable, opened hbr manual valve and flowed hbr @150sccm and i monitor for 10mins, hbr mfc is stable. i cycled the tool using recipe77 without a problem. From cbaxter at snf.stanford.edu Mon Feb 20 23:10:04 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 23:10:04 -0800 Subject: Problem lampoly SNF 2006-02-18 13:34:53: Error message Message-ID: From cbaxter at snf.stanford.edu Mon Feb 20 23:10:08 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 23:10:08 -0800 Subject: Comment lampoly SNF 2006-02-18 16:05:17: lam etcher-- stuck wafers are just dummies Message-ID: From mtang at snf.stanford.edu Tue Feb 21 15:50:05 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 21 Feb 2006 15:50:05 -0800 Subject: Shutdown lampoly SNF 2006-02-21 15:50:04: HBr MFC not controlling Message-ID: We kept getting MFC2 control alarms. The HBr MFC bounces around the setpoint. Everything else seemed to look OK. From eenriquez at snf.stanford.edu Wed Feb 22 20:54:01 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Feb 2006 20:54:01 -0800 Subject: Shutdown lampoly SNF 2006-02-21 15:50:04: HBr MFC not controlling Message-ID: Flowed HBr at 50, 100 and 200 sccm for 3 minutes. Flows were very stable for all settings. From treviscrane at snf.stanford.edu Fri Feb 24 14:47:33 2006 From: treviscrane at snf.stanford.edu (treviscrane at snf.stanford.edu) Date: Fri, 24 Feb 2006 14:47:33 -0800 Subject: Shutdown lampoly SNF 2006-02-24 14:47:32: two wafers stuck in load lock Message-ID: From cbaxter at snf.stanford.edu Fri Feb 24 20:25:14 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 24 Feb 2006 20:25:14 -0800 Subject: Shutdown lampoly SNF 2006-02-24 14:47:32: two wafers stuck in load lock Message-ID: elmer and i recovered the wafers on the entrance load lock but the wafer inside the chamber broke. we vented the chamber and vacuum broken wafer chips. i manually load/unload wafer from chamber to entrance load and did see any problem with the handoff.