Shutdown lampoly SNF 2006-02-02 15:10:10: RF Error

mtang at snf.stanford.edu mtang at snf.stanford.edu
Thu Feb 2 15:10:10 PST 2006


While running dummy wafers, recipe #1, the RF power comes on.  It reaches the set point of 250 W on the top electrode (248-252 W) in step 3 but the lower electrode only gets to 30 (setpoint 40W.)  Then, the system alarms red.




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