Problem lampoly SNF 2006-02-12 20:16:57: Gas 2 flow unstable

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Feb 12 20:16:59 PST 2006


machine aborted main etch (step 5) after a few seconds--HBr flow was unstable (I saw it fluctuating continuously between 85 and 115 sccm).  retried with same result.




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