Problem lampoly SNF 2006-02-18 14:58:43: Lam etcher, same problem with HBr flow

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Feb 20 23:09:59 PST 2006


close the manual valve on  system  gas box and pumped out
hbr for 1hr. pump purge hbr mfc till become stable, opened
hbr manual valve and flowed hbr @150sccm and i monitor
for 10mins, hbr mfc is stable. i cycled the tool using recipe77
without a problem.




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