Shutdown lampoly SNF 2006-02-21 15:50:04: HBr MFC not controlling

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Feb 22 20:54:01 PST 2006


Flowed HBr at 50, 100 and 200 sccm for 3 minutes.  Flows were very stable for all settings.




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