Shutdown lampoly SNF 2006-02-24 14:47:32: two wafers stuck in load lock

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Feb 24 20:25:14 PST 2006


elmer and i recovered the wafers on the entrance load
lock but the wafer inside the chamber broke. we vented
the chamber and vacuum broken wafer chips.  i manually
load/unload wafer from chamber to entrance load and did see
any problem with the handoff.




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