From cbaxter at snf.stanford.edu Fri Jan 6 18:42:45 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Jan 2006 18:42:45 -0800 Subject: Comment lampoly SNF 2005-11-17 20:32:52: won't boot up Message-ID: From cbaxter at snf.stanford.edu Fri Jan 6 18:42:53 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Jan 2006 18:42:53 -0800 Subject: Comment lampoly SNF 2005-11-10 18:57:04: Message-ID: From cbaxter at snf.stanford.edu Fri Jan 6 18:43:29 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Jan 2006 18:43:29 -0800 Subject: Shutdown lampoly SNF 2005-11-10 16:17:24: Computer lock-up/ water leak Message-ID: repaired bad wire on cpu board. From king at snf.stanford.edu Fri Jan 13 13:03:50 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 13 Jan 2006 13:03:50 -0800 Subject: Shutdown lampoly SNF 2006-01-13 13:03:49: Lam poly turbo pump problem Message-ID: Error 252- Turbo pump not ready Error 253- Pressure exceeds 3mT Have tried clearing and problem persists. Thanks. From eenriquez at snf.stanford.edu Fri Jan 13 16:52:48 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jan 2006 16:52:48 -0800 Subject: Shutdown lampoly SNF 2006-01-13 13:03:49: Lam poly turbo pump problem Message-ID: Restarted the turbo pump and cleared all alarms. From rwoo at snf.stanford.edu Sat Jan 14 09:42:35 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sat, 14 Jan 2006 09:42:35 -0800 Subject: Shutdown lampoly SNF 2006-01-14 09:42:34: Error 297 - chamber pressure Message-ID: On first seasoning wafer received Error 297: "Chamber pressure did not equalize to xover pressure within 60 seconds" Wafers stuck on transport path - if possible please return the two wafer (one in load chamber, one on flat finder) to box on table marked rwoo lampoly dummies. From cbaxter at snf.stanford.edu Tue Jan 17 12:30:19 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jan 2006 12:30:19 -0800 Subject: Shutdown lampoly SNF 2006-01-14 09:42:34: Error 297 - chamber pressure Message-ID: reset l/l pump and recovered wafers. From king at snf.stanford.edu Tue Jan 17 15:42:05 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 17 Jan 2006 15:42:05 -0800 Subject: Shutdown lampoly SNF 2006-01-17 15:42:05: Lam poly etcher- Error 81 Message-ID: "Recipe aborted. RF hard tolerance exceeded during RF on step." Two dummy wafers are stuck in the system. From cbaxter at snf.stanford.edu Wed Jan 18 08:56:56 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Jan 2006 08:56:56 -0800 Subject: Shutdown lampoly SNF 2006-01-17 15:42:05: Lam poly etcher- Error 81 Message-ID: upper generator was off. resumed running using the same recipe#22 without a problem. From rwoo at snf.stanford.edu Wed Jan 18 15:53:41 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 18 Jan 2006 15:53:41 -0800 Subject: Problem lampoly SNF 2006-01-18 15:53:41: Error 81 Message-ID: RF not turning on From cbaxter at snf.stanford.edu Wed Jan 18 16:17:48 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Jan 2006 16:17:48 -0800 Subject: Problem lampoly SNF 2006-01-18 15:53:41: Error 81 Message-ID: reset upper generator. From king at snf.stanford.edu Wed Jan 18 16:21:13 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 18 Jan 2006 16:21:13 -0800 Subject: Problem lampoly SNF 2006-01-18 16:21:11: Lam RF problem Message-ID: Another user got an RF failure and was told not to run it yet. From cbaxter at snf.stanford.edu Thu Jan 19 14:45:31 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Jan 2006 14:45:31 -0800 Subject: Shutdown lampoly SNF 2006-01-19 14:45:27: No RF enable signal for both upper and lower. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 20 16:54:23 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 20 Jan 2006 16:54:23 -0800 Subject: Shutdown lampoly SNF 2006-01-19 14:45:27: No RF enable signal for both upper and lower. Message-ID: changed lower rf generator and installed new water line for the rf generator. From cbaxter at snf.stanford.edu Fri Jan 20 16:55:21 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 20 Jan 2006 16:55:21 -0800 Subject: Problem lampoly SNF 2006-01-18 16:21:11: Lam RF problem Message-ID: changed rf generator. From rwoo at snf.stanford.edu Mon Jan 23 00:50:53 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Mon, 23 Jan 2006 00:50:53 -0800 Subject: Problem lampoly SNF 2006-01-23 00:50:52: HBr etch not working Message-ID: For Recipe 25: - bias voltage reads 0 during all etch steps - Back RF is unstable during main etch (only reaches 50W with setpoint of 60W and reflected power is 25W) - No etch detected on test wafers - Test wafers appear to have been deposited with an oxide like substance From king at snf.stanford.edu Mon Jan 23 14:57:58 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 23 Jan 2006 14:57:58 -0800 Subject: Shutdown lampoly SNF 2006-01-23 14:57:57: lampoly shutdown- film deposition Message-ID: on my wafers, similar to Ray's. From cbaxter at snf.stanford.edu Mon Jan 23 22:27:04 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 Jan 2006 22:27:04 -0800 Subject: Shutdown lampoly SNF 2006-01-23 14:57:57: lampoly shutdown- film deposition Message-ID: wet cleaned chamber and condition. From cbaxter at snf.stanford.edu Mon Jan 23 22:27:55 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 Jan 2006 22:27:55 -0800 Subject: Problem lampoly SNF 2006-01-23 00:50:52: HBr etch not working Message-ID: