Shutdown lampoly SNF 2006-01-13 13:03:49: Lam poly turbo pump problem

king at snf.stanford.edu king at snf.stanford.edu
Fri Jan 13 13:03:50 PST 2006


Error 252- Turbo pump not ready
Error 253- Pressure exceeds 3mT
Have tried clearing and problem persists. Thanks.




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