Shutdown lampoly SNF 2006-01-14 09:42:34: Error 297 - chamber pressure

[rwoo at snf.stanford.edu]

On first seasoning wafer received Error 297:
"Chamber pressure did not equalize to xover pressure within 60 seconds"
Wafers stuck on transport path - if possible please return the two wafer (one in load chamber, one on flat finder) to box on table marked rwoo lampoly dummies.