Shutdown lampoly SNF 2006-01-14 09:42:34: Error 297 - chamber pressure

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Sat Jan 14 09:42:35 PST 2006


On first seasoning wafer received Error 297:
"Chamber pressure did not equalize to xover pressure within 60 seconds"
Wafers stuck on transport path - if possible please return the two wafer (one in load chamber, one on flat finder) to box on table marked rwoo lampoly dummies.




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