Shutdown lampoly SNF 2006-01-14 09:42:34: Error 297 - chamber pressure
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Jan 17 12:30:19 PST 2006
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Shutdown lampoly SNF 2006-01-14 09:42:34: Error 297 - chamber pressure
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Shutdown lampoly SNF 2006-01-17 15:42:05: Lam poly etcher- Error 81
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reset l/l pump and recovered wafers.
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Shutdown lampoly SNF 2006-01-14 09:42:34: Error 297 - chamber pressure
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Shutdown lampoly SNF 2006-01-17 15:42:05: Lam poly etcher- Error 81
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