Problem lampoly SNF 2006-01-23 00:50:52: HBr etch not working

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Mon Jan 23 00:50:53 PST 2006


For Recipe 25:
- bias voltage reads 0 during all etch steps
- Back RF is unstable during main etch (only reaches 50W with setpoint of 60W and reflected power is 25W)
- No etch detected on test wafers
- Test wafers appear to have been deposited with an oxide like substance




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